High vacuum depositon

High vacuum deposition equipment With the help of modern high vacuum- PVD- equipment we are able to deposit flat and non-flat substrates with metallic, semiconductive or insulative materials in small and midle series production. 
PVD-deposition is especially suitable for: 

  • metalize of ceramic, e. g. for conductive lanes and electrical contacts
  • metalize of glass, e. g. for  solderable connections
  • deposition of foils, e. g. for electrically conductive films
The maximum size of substrats is 8 x 8 cm 2 and up to 6 substrates can be deposited in each deposition cycle. 

The following deposition methods are available: 

  • dc-magnetron-sputtering, e. g. for CrNi, Ni, Mo, W
  • rf-magnetron-sputtering, e. g. for SiO2
  • thermal evaporation, e. g. for Au, Ag, Al
  • flash-evaporation for chemical compounds and alloys
There are also extensive measuring techniques to accompany the production process, e. g. determination of film thickness, optical, mechanical and elektrical properties, for the quality management. 

All substrates can be treated before deposition in situ for surface cleaning with inverse sputtering etching. This pretreatment ensure good sticking properties of the thin films on the substrates.

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D.T.S. • Thin Film Thermoelectric Generator Systems GmbH
Köthener Str. 34 • D-06118 Halle 
Telephon/Telefax: +49 (0) 345  52 44 292
e-mail: dts@dts-generator.com

last update: 07/2002